WS-210 Series
Full automatic wafer sorter with high-speed transfer capability for 150 & 200 mm wafers, and a high performance ID recognition processing function.
Features
- Utilizes the double robot system for high throughput. (450 wafer/hr)
- A high performance optic system which allows the recognition of low contrast characters.
- Allows assorted usage of various 150mm/200mm carriers.
- Two types are available; Space saving 2 port type or 4 port type suitable for composition.
- Applicable to Automated Material Handling System.(AMHS)
- Proven upward communications with automated production control system.
WS-211-4FA
Specification
| Item | Description | |
|---|---|---|
| Wafer | Diameter : 150/200mm (mixed use is possible), thickness : 150-725µm | |
| Wafer ID | Kind of characters : SEMI font OCR, Canon font OCR, 2D code, etc Writing method : Laser writing (Soft/hard laser, single/double dot) Writing face : Wafer surface |
|
| Carrier | Various process carriers, shipping carriers of wafer manufactures | |
| Wafer carrier method | Robot : Double carrier robot Hand : Backside vacuum |
|
| Data management | (1) Start history : 6 months (Old data will be deleted automatically) (2) Alarm history : 100 events (3) Assist history : 100 events (including wafer ID image data) |
|
| Utility | Power supply | AC100V, Single phase, 15A, 50/60Hz |
| Dry air | 520-588kPa,Flow rate 30litter/min | |
| Vacuum source | -70-100kPa, Flow rate 30litter/min | |
| Dimensions | (W)660*(D)1,100*(H)1,500[mm](2 port type) (W)1,230*(D)900*(H)1,500[mm](4 port type) |
|
| Weight | 500kg (2 port type) 700kg (4 port type) |
|
WS-220 Series
Using wafer ID recognition, this equipment is space saving type suitable for wafer sorting and ID data management.
Features
- High Throughput（450 wafer/hr）.
- Increase of character recognition rate with high functional optics.
- Space saving 4 cassette type.
WS-211-4
Specification
| Item | Description | |
|---|---|---|
| Wafer | Diameter : 150/200mm (mixed use is possible), thickness : 150-725µm | |
| Wafer ID | Kind of characters : SEMI font OCR, Canon font OCR, 2D code, etc Writing method : Laser writing (Soft/hard laser, single/double dot) Writing face : Wafer surface |
|
| Carrier | Various process carriers, shipping carriers of wafer manufactures | |
| Wafer carrier method | Robot : Double carrier robot Hand : Backside vacuum |
|
| Data management | (1) Start history : 6 months (Old data will be deleted automatically) (2) Alarm history : 100 events (3) Assist history : 100 events (including wafer ID image data) |
|
| Utility | Power supply | AC100V, Single phase, 15A, 50/60Hz |
| Dry air | 520-580kPa,Flow rate 30litter/min | |
| Vacuum source | -70-100kPa, Flow rate 30litter/min | |
| Dimensions | (W)800*(D)1,100*(H)1,800[mm](4 port type) | |
| Weight | About 700kg | |
WS-300 Series
Wafer sorter for 300mm wafer applicable to clean carrier, wafer-by-wafer control, and full automatic carrier system.
Features
- Wafer particles are significantly reduced by adopting the carrier method of no contacting the wafer backside.
- A high performance optic system which allows the recognition of low contrast characters.
- Compatible with various FOUP and FOSB carriers.
- Rich variation of equipment. (applicable to 2 - 10 carriers)
- Applicable to advanced production control by the use of full-wafer-by wafer control.
- Proven upward communications with automated production control system.
WS-300-6F6
Specification
| Item | Description | |
|---|---|---|
| Wafer | Diameter : 300mm, Thickness : 775µm | |
| Wafer ID | Kind of characters : SEMI font OCR, Canon font OCR, 2D code, etc Writing method : Laser writing (Soft/hard laser, single/double dot) Writing face : Surface and backside of wafer |
|
| Carrier | FOUP, FOSB, FIMS door type FOSB, Open cassette | |
| Wafer carrier method | Robot: Scalar type clean carrier robot Hand: Edge clamp |
|
| Data management | (1) Start history : 6 months (Old data will be deleted automatically) (2) Alarm history : 100 events (3) Assist history : 100 events (including wafer ID image data) |
|
| Utility | Power suppl | AC100V, Single phase, 20A, 50/60Hz |
| Dry air | 520-588kPa, Flow rate, 30litter/min | |
| Vacuum Source | -70-100kPa, Flow rate, 30litter/min | |
| Dimensions | (W)1,280*(D)1,985*(H)1,800[mm] (2 port type) | |
| Weight | 750kg (2 port type) | |
