UG-500/510/ Multi-function APIMS
Real-time PPT-level (parts per trillion) gas analyzer necessary for the clean technology.
Features
- In-line real-time measurement is made possible by direct introduction of sample gases.
- Examination of mass spectrum and the time saving changes of specified peaks are possible.
- Atmospheric and environmental analysis is achievable.
- Respiratory gas analysis is achievable.
- Particular gas analysis is possible (Silane, CFC, etc.).
Specification
| Item | Description | |
|---|---|---|
| Gases | UG-500 | Nitrogen, Argon |
| UG-510 | Nitrogen, Argon, Hydrogen, Helium | |
| Impurities | H2O , O2 , CO2, CH4 | |
| Ionization | Atmospheric pressure ionization method | |
| Analyzer | Quadruple mass spectrometer | |
| Mass range | m/z=3-200 | |
| Guaranteed sensitivity | H2O : 5ppt O2 : 50ppt |
|
| Utilities | Power supply : AC200V 120A | |
| Dimensions | UG-500 | (W)500*(D)700*(H)1,100[mm] |
| UG-510 | (W)500*(D)700*(H)1,200[mm] | |
